JPH0453252B2 - - Google Patents

Info

Publication number
JPH0453252B2
JPH0453252B2 JP60043388A JP4338885A JPH0453252B2 JP H0453252 B2 JPH0453252 B2 JP H0453252B2 JP 60043388 A JP60043388 A JP 60043388A JP 4338885 A JP4338885 A JP 4338885A JP H0453252 B2 JPH0453252 B2 JP H0453252B2
Authority
JP
Japan
Prior art keywords
moisture
diaphragm
pellet
sensitive
humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60043388A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61202152A (ja
Inventor
Toshihiko Nishimura
Sadao Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP4338885A priority Critical patent/JPS61202152A/ja
Publication of JPS61202152A publication Critical patent/JPS61202152A/ja
Publication of JPH0453252B2 publication Critical patent/JPH0453252B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP4338885A 1985-03-05 1985-03-05 湿度検出装置 Granted JPS61202152A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4338885A JPS61202152A (ja) 1985-03-05 1985-03-05 湿度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4338885A JPS61202152A (ja) 1985-03-05 1985-03-05 湿度検出装置

Publications (2)

Publication Number Publication Date
JPS61202152A JPS61202152A (ja) 1986-09-06
JPH0453252B2 true JPH0453252B2 (en]) 1992-08-26

Family

ID=12662414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4338885A Granted JPS61202152A (ja) 1985-03-05 1985-03-05 湿度検出装置

Country Status (1)

Country Link
JP (1) JPS61202152A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07117485B2 (ja) * 1986-09-19 1995-12-18 三洋電機株式会社 湿度検出装置
JPH0814554B2 (ja) * 1987-02-18 1996-02-14 三洋電機株式会社 湿度検出装置
CN115523961B (zh) * 2022-11-03 2023-02-28 南京元感微电子有限公司 一种气体与电容式压力传感器及其加工方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028784U (en]) * 1973-07-09 1975-04-02
JPS587179B2 (ja) * 1974-10-14 1983-02-08 ジドウシヤコウガイアンゼンキキギジユツケンキユウクミアイ 半導体歪ゲ−ジ式圧力センサ
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector

Also Published As

Publication number Publication date
JPS61202152A (ja) 1986-09-06

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Legal Events

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